Thermal Clean Chamber
· ISO Class 5 (Class 100) cleanliness.
· Temperature control: ±0.03°C to ±0.1°C.
· Customizable equipment size for device compatibility.
· Multi-layer safety circuits for reliability.
· Prevents defects from particles, gases, and environmental fluctuations, ensuring high precision and cleanliness.
· Humidity control: 40%-60% RH (standard) or 5%-40% RH (low humidity).
· PID control and precision airflow ensure temperature accuracy of 0.01°C to 0.1°C.
· Applications:
Semiconductors: Lithography, exposure systems, e-beam equipment.
Display Panel Manufacturing: LCDs, touch panels, thin films.
Precision Instruments: 2D/3D measurement machines.
Precision Environmental Instruments: Temperature-sensitive sample handling.
| Model | TCC-60S | |
|---|---|---|
| Cleanliness | ISO Class 5（Particle size 0.3μm）（Equivalent Class 100） | |
| Appearance size(MM) | 1700(W) x 3735(D) x 2350(H) | |
| Internal dimensions(MM) | 1580(W) x 2975(D) x 1980(H) | |
| Air Velocity (m/s) | 0.25 | |
| Air Volume (CMM) | 60 | |
| Number of cycles (times/hour) | 387 | |
| Filter | Main Filter：HEPA Filter Pre-Filter：Non-Woven Filter |
|
| Temperature setting | 20～23℃ ±0.03℃ (single point guarantee) Temperature distribution:±0.1℃ | |
| Surrounding conditions | Temperature setting ±2℃ but no sudden temperature change) | |
| Cooler | 2HP（1.5kW）Water-cooled（Cooling water volume 13 L/min［25℃］）（Reference:：32 L/min［32℃］） | |
| Evaporator | Direct expansion aluminum plate fin type - anodized coating | |
| Heater | Electric heater (6 kW × 1 unit, 2 kW × 1 unit) | |
| Thermostat | Electronic temperature regulator | |
| Control | PID control | |
| Construction | Air conditioning unit - Made of steel plate, painted Surrounding sides - Made of steel plate, painted Front - Insulated panel door |
|
| Light | LED light 20W equivalent × 4 lights (yellow) | |
| Color | Ivory white, Pearl white | |
| Necessary equipment and equipment power | Electrical | AC 220V、3φ、50Hz、75A |
| Cooling water | Water volume: 13 L/min [25℃] (reference: 32 L/min [32℃]) Supply pressure: 0.25~0.6 MPa (but no sudden pressure change), and the pressure difference between the inlet and outlet must be above 0.25 MPa. Temperature: Above 16℃ (Lower than 16℃, please specify separately) |
|
| Drain | Drainage pipes must discharge within 3 meters without diameter changes or redirect downward. Cooling water inlets, outlets, drains, and compressed air connections are at the air conditioner's base (2 internal outlets). |
|
| Display abnormality and safety circuit | ．Fan, heater, cooling system, temperature, water leakage abnormalities ．Fan ~ heater interlock, waste heat prevention circuit |
|
| Exclusions | Excludes primary electrical work, primary cooling water inlets, outlets and drainage piping | |
| Weight(kg) | 1000 | |
| Remark | Automatically stops when water supply is cut. | |
| Other | Body groundIncludes temperature controller and sensor（cable length outside machine ~ 4M） Terminal block for primary power supply Refrigerant gas R407C |
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